Design, performance and analysis of thermal lag of the UFS1 twin-calorimeter chip for fast scanning calorimetry using the Mettler-Toledo Flash DSC 1

This paper presents a new twin-membrane calorimeter chip for fast differential scanning calorimetry (DSC) with the Flash DSC 1 of Mettler-Toledo. The thin silicon nitride membranes enable scan rates in excess of 10 kK/s in heating and up to 4 kK/s in cooling for sample masses between 100 ng and 10 μg in the temperature range of −100 °C to 450 °C. The time constant for cooling is about 12 ms, the power resolution is typically 0.1–0.5 μW, the temperature accuracy of non-calibrated chips is typically better than ±5 K. The paper also shows measurements for the scan-rate dependent thermal lag of the device, showing an empty sensor thermal lag of about 0.2 ms, and a mass dependent thermal lag of about 0.3 ms/μg for Indium for a good thermal contact between Indium and membrane.