Virtual Design and Visual Simulation of Cathode Target on Magnetron Sputtering Coater

In order to solve the traditional problems such as long designing cycle and high designing cost, the research applies the virtual simulation technology to the design of cathode target on magnetron sputtering vacuum coater. Through analyzing, modeling and simulating, the process model of a typical cathode target on magnetron sputtering coater is proposed. The virtual design of cathode target framework based on distributed collaborative simulation is constructed, which provides a theorial basis for the research of virtual design on cathode target.Using Solidworks software, parts modeling and assembly modeling of cathode target are realized. Using ADAMS, the movements of charged particles in magnetic field and high frequency alternating electric field are simulated, and the visual animation simulation of particles movement is achieved. The research demonstrates the feasibility of virtual simulation technology on vacuum coater design.