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Analysis of residual thermal stress for AlN crystal growth by PVT

Authors :
Z.Y. Qin
W.L. Li
Z.H. Sun
J.H. Ji
H.L. Wu
L. Jin
Source :
Vacuum. 214:112237
Publication Year :
2023
Publisher :
Elsevier BV, 2023.

Details

ISSN :
0042207X
Volume :
214
Database :
OpenAIRE
Journal :
Vacuum
Accession number :
edsair.doi...........0d4d16c39a3fafc734a2b6df1327019e
Full Text :
https://doi.org/10.1016/j.vacuum.2023.112237