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Analysis of residual thermal stress for AlN crystal growth by PVT
- Source :
- Vacuum. 214:112237
- Publication Year :
- 2023
- Publisher :
- Elsevier BV, 2023.
- Subjects :
- Condensed Matter Physics
Instrumentation
Surfaces, Coatings and Films
Subjects
Details
- ISSN :
- 0042207X
- Volume :
- 214
- Database :
- OpenAIRE
- Journal :
- Vacuum
- Accession number :
- edsair.doi...........0d4d16c39a3fafc734a2b6df1327019e
- Full Text :
- https://doi.org/10.1016/j.vacuum.2023.112237