Fabrication of Holographic Lithography Micro-Nano Gratings Using Metal Mask

Authors :: 邹永刚 Zou Yonggang
王海珠 Wang Haizhu
宋子男 Song Zinan
龚春阳 Gong Chun-yang
崔超 Cui Chao
赵鑫 Zhao Xin
马晓辉 Ma Xiaohui
范杰 Fan Jie
Source :: Chinese Journal of Lasers. 46:1203001
Publication Year :: 2019
Publisher :: Shanghai Institute of Optics and Fine Mechanics, 2019.

Subjects :: Fabrication
Materials science
law
Micro nano
Holography
Nanotechnology
Electrical and Electronic Engineering
Lithography
Atomic and Molecular Physics, and Optics
Electronic, Optical and Magnetic Materials
law.invention

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