High Quality SiC Substrates for Semiconductor Devices: From Research to Industrial Production

Authors :: D.P. Malta
H. McD. Hobgood
M.F. Brady
Valeri F. Tsvetkov
S.T. Allen
Jason Ronald Jenny
R.C. Glass
D. Henshall
William H Brixius
John W. Palmour
Calvin H. Carter
R.T. Leonard
Stephan G. Müller
Adrian Powell
G. Fechko
Source :: Materials Science Forum. :23-28
Publication Year :: 2002
Publisher :: Trans Tech Publications, Ltd., 2002.

Subjects :: Materials science
Mechanical Engineering
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Industrial production
Semiconductor device
Condensed Matter Physics
Engineering physics
Micropipe
Mechanics of Materials
Electrical resistivity and conductivity
Electronic engineering
General Materials Science
Quality (business)
media_common

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