Application of femtosecond laser in quartz tuning device microprocessing

Quartz tuning fork is a kind of widely used piezoelectric device. However, as a hard and brittle material, silicon dioxide crystal, which is the core component of tuning fork, is difficult to realize high precision microprocessing. In this paper, femtosecond laser is used to process silicon dioxide crystal. The laser processing parameters which affect quality of tuning fork sidewall are theoretically analyzed, and an experimental study is carried out to optimize the technological parameters and improve the quality of tuning fork crystal. In addition, a set of processing route of quartz tuning device is designed, The tuning fork sensor manufactured has the characteristics of low cost, compact structure, low power consumption and will have a wide application prospects in the future.