Topographic measurement of buried thin-film interfaces using a grazing resonant soft x-ray scattering technique

Authors :: Harald Ade
Justin E. Cochran
Cheng Wang
John R. Tumbleston
Eliot Gann
Anne Watson
Jaewook Seok
Michael L. Chabinyc
Hongping Yan
Source :: Physical Review B. 90
Publication Year :: 2014
Publisher :: American Physical Society (APS), 2014.

Subjects :: Soft x ray
Materials science
business.industry
Scattering
02 engineering and technology
021001 nanoscience & nanotechnology
Condensed Matter Physics
01 natural sciences
Electronic, Optical and Magnetic Materials
Optics
0103 physical sciences
Thin film
010306 general physics
0210 nano-technology
business

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