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The Reactivity of HCI and Methyltrichlorosilane with Silicon Carbide Surfaces
- Source :
- MRS Proceedings. 282
- Publication Year :
- 1992
- Publisher :
- Springer Science and Business Media LLC, 1992.
-
Abstract
- This work explores the reactivity of HCI and methyltrichlorosilane (MTS) with polycrystalline β-silicon carbide (SiC) surfaces using temperature-programmed desorption (TPD) and Auger electron spectroscopy. HCl is a corrosive gas that inhibits SiC deposition. The results show that HCl is adsorbed by SiC, forming a stable surface chloride that could inhibit SiC deposition. TPD shows that chlorine desorbs as HCI or SiCl4, confirming that HCl can etch SiC surfaces. Desorption is rate-limited by the breaking of Si-Cl bonds. MTS is also adsorbed by SiC; its desorption is similar to that of HCI.
Details
- ISSN :
- 19464274 and 02729172
- Volume :
- 282
- Database :
- OpenAIRE
- Journal :
- MRS Proceedings
- Accession number :
- edsair.doi...........0a8df7a1e812f10679d124cc30a8a3d3