Back to Search Start Over

Influence of post-oxidizing treatment on passivation performance on the spin-coated titanium oxide films on crystalline silicon

Authors :
Hao Luo
Van Hoang Nguyen
Kazuhiro Gotoh
Saya Ajito
Tomohiko Hojo
Yasuyoshi Kurokawa
Eiji Akiyama
Noritaka Usami
Source :
Thin Solid Films. 764:139597
Publication Year :
2023
Publisher :
Elsevier BV, 2023.

Details

ISSN :
00406090
Volume :
764
Database :
OpenAIRE
Journal :
Thin Solid Films
Accession number :
edsair.doi...........0a6cde41be58a2b423c2377497a996f0
Full Text :
https://doi.org/10.1016/j.tsf.2022.139597