Deconvolution of energy-dispersive reflection data using the Maximum Entropy Principle

At the previous OSA meeting on X-ray multilayers P. Dhez described using a white-beam, fixed-angle, solid-state detector experiment (the so called energy-dispersive setup) for easy characterization of multilayer structures. The simplicity of the setup makes it ideal for in-situ analysis and hard x-ray reflectivity measurements. The multilayer d-spacings can be readily obtained using only the spectrum of the reflected beam, and the absolute reflectivities can be obtained using both the white-beam spectrum and the reflected spectrum. The simplicity of the setup makes it ideal for in-situ analysis and hard x-ray reflectivity measurements. The multilayer d-spacings can be readily obtained using only the spectrum of the reflected beam, and the absolute reflectivities can be obtained using both the white-beam spectrum and the reflected spectrum. Figure 1 shows an example of a observed white-beam spectrum consisting of Bremsstralung and superimposed W-fluorescence lines. Figure 2 shows an example of the observed spectrum after reflection with a multilayered supermirror structure (described elsewhere in these proceedings).