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DEFECT-RELATED ISSUES IN HIGH-K DIELECTRICS
- Source :
- Defects in High-k Gate Dielectric Stacks ISBN: 1402043651
- Publication Year :
- 2006
- Publisher :
- Kluwer Academic Publishers, 2006.
Details
- ISBN :
- 978-1-4020-4365-9
1-4020-4365-1 - ISBNs :
- 9781402043659 and 1402043651
- Database :
- OpenAIRE
- Journal :
- Defects in High-k Gate Dielectric Stacks ISBN: 1402043651
- Accession number :
- edsair.doi...........0a50b76b8e2573045576bde40ddbaed2
- Full Text :
- https://doi.org/10.1007/1-4020-4367-8_15