A High-Sensitivity Micromechanical Silicon Resonant Accelerometer without Mechanical Coupling

Micromechanical silicon resonant accelerometer can easily realize high-accuracy measurement by taking the digital signal as the output. Thus, this accelerometer has become popular in the field of micromechanical accelerometer. One-mass accelerometer with differential structure has blind area in measuring, and to overcome this deficiency, a new structure without mechanical coupling is designed. This new structure can cut off coupling channels by isolating the mass, and vibration decoupling between two resonators can be achieved structurally. Furthermore, the scale factor of the designed accelerometer is as high as 295 Hz/g. This finding indicates that this accelerometer has high mechanical sensitivity, which reduces the difficulty of follow-up testing.