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Etching Fabrication of Nanostructures Using Metal Clusters as Formation Nuclei

Authors :
Kenji Koga
Toshihiko Kanayama
Tetsuya Tada
Source :
SHINKU. 42:91-96
Publication Year :
1999
Publisher :
The Vacuum Society of Japan, 1999.

Subjects

Subjects :
Fabrication
Materials science
Nanostructure
Etching (microfabrication)
Nanotechnology
Electrical and Electronic Engineering
Condensed Matter Physics
Surfaces, Coatings and Films
Metal clusters

Details

ISSN :
18809413 and 05598516
Volume :
42
Database :
OpenAIRE
Journal :
SHINKU
Accession number :
edsair.doi...........0977fbbec997930b4aa1eaffcb48eb3d
Full Text :
https://doi.org/10.3131/jvsj.42.91
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