Modification of silicon properties with lasers, electron beams, and incoherent light

Lasers have long established a permanent position in manufacturing.1–5 They are used to cut hard and brittle materials, to weld metallic objects rapidly and efficiently, to harden locally surfaces of metals, and to drill microscopic holes in materials as diverse as rubber and steel. High power electron beams are routinely used for spot welding and to a lesser extent for cutting and drilling.