Improving the electrical performance of vertical thin-film transistor by engineering its back-channel interface

Subjects

Subjects :

Electrical and Electronic Engineering
Condensed Matter Physics
Atomic and Molecular Physics, and Optics
Surfaces, Coatings and Films
Electronic, Optical and Magnetic Materials

Details

ISSN :

01679317

Volume :

253

Database :

OpenAIRE

Journal :

Microelectronic Engineering

Accession number :

edsair.doi...........08e33bbb52fbd56b131448c0d17d8886

Full Text :

https://doi.org/10.1016/j.mee.2021.111676