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Lithography using nano-lens arrays made of light

Authors :
M. Drewsen
Tilman Pfau
B. Brezger
Vahid Sandoghdar
Jürgen Mlynek
Th. Schulze
U. Drodofsky
Source :
Journal of Modern Optics. 44:1883-1898
Publication Year :
1997
Publisher :
Informa UK Limited, 1997.

Abstract

We discuss the fabrication of various one and two-dimensional chromium nanostructures. A chromium atomic beam effusing out of a thermal oven is first transversally laser cooled. This well-collimated beam is then structured and focused by the optical dipole force in a periodic light field. By introducing a substrate at the focus of the atomic beam we are able to capture this pattern directly. We discuss a few applications and challenges of this young lithography technique.

Details

ISSN :
13623044 and 09500340
Volume :
44
Database :
OpenAIRE
Journal :
Journal of Modern Optics
Accession number :
edsair.doi...........07db0398db08dd253ae0c171573eff44