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Lithography using nano-lens arrays made of light
- Source :
- Journal of Modern Optics. 44:1883-1898
- Publication Year :
- 1997
- Publisher :
- Informa UK Limited, 1997.
-
Abstract
- We discuss the fabrication of various one and two-dimensional chromium nanostructures. A chromium atomic beam effusing out of a thermal oven is first transversally laser cooled. This well-collimated beam is then structured and focused by the optical dipole force in a periodic light field. By introducing a substrate at the focus of the atomic beam we are able to capture this pattern directly. We discuss a few applications and challenges of this young lithography technique.
- Subjects :
- Condensed Matter::Quantum Gases
Materials science
Fabrication
business.industry
Physics::Optics
Laser
Atomic and Molecular Physics, and Optics
law.invention
Lens (optics)
Optics
law
Physics::Atomic and Molecular Clusters
Physics::Accelerator Physics
X-ray lithography
Physics::Atomic Physics
Photolithography
business
Lithography
Light field
Beam (structure)
Subjects
Details
- ISSN :
- 13623044 and 09500340
- Volume :
- 44
- Database :
- OpenAIRE
- Journal :
- Journal of Modern Optics
- Accession number :
- edsair.doi...........07db0398db08dd253ae0c171573eff44