The application of e beam inspection on 3D NAND flash

Authors :: Kuang-Yeu Hsieh
Ling-Wu Yang
Tahone Yang
Guan-Ru Lee
Kuang-Chao Chen
Hsiang-Chou Liao
Chih-Yuan Lu
Yen-Hao Shih
Rich Liu
Hang-Ting Lue
Yi-Chin Chen
Tuung Luoh
Source :: 2012 e-Manufacturing & Design Collaboration Symposium (eMDC).
Publication Year :: 2012
Publisher :: IEEE, 2012.
Abstract: Various three-dimensional (3D) multilayer stacks NAND flash architectures are developed by several companies, the defect performance monitoring under such complicated architectures has become a new challenge in 3D NAND flash. The aim of this paper is to illustrate e beam inspection system can monitor the tiny, invisible defects and electrical defects that can not be recognized by optical systems.