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High-energy x-ray photoelectron spectroscopy on Si3N4 with Ga Kα photons

Authors :
Fiona Crystal Mascarenhas
Ilse Hoflijk
Anja Vanleenhove
Inge Vaesen
Charlotte Zborowski
Thierry Conard
Source :
Surface Science Spectra. 29:014015
Publication Year :
2022
Publisher :
American Vacuum Society, 2022.

Details

ISSN :
15208575 and 10555269
Volume :
29
Database :
OpenAIRE
Journal :
Surface Science Spectra
Accession number :
edsair.doi...........0753e9819146de92dca214087ee7033a