Fundamental Properties and Nano-imprintabilities of Zr-, Pd- and Cu-based Glassy Alloy Thin Films

With the aim of investigating fundamental properties and nano-imprintabilities of glassy alloy in the film form, Zr49Al11Ni8Cu32, Pd39Cu29Ni13P19 and Cu38Zr47Al9Ag6 alloy thin films were fabricated on Si substrate by a magnetron sputtering method. These thin films exhibit distinct glass-tradition phenomenon and large supercooled liquid region of about 80 K, confirming as a glassy structure and have very smooth surface and sufficient hardness to maintain imprinted shape, which are suitable for nano-imprint processing. Moreover, thermal nano-imprintabilies of these obtained films are demonstrated by using a dot array mold with a dot diameter of 90 nm and a pitch of 180 nm. Surface observations revealed that periodic nano-hole arrays were successfully imprinted on the surface of these films and precisely corresponded to the periodic dot pattern of the mold. Particularly, Pd-based glassy alloy thin film indicated more precise pattern imprintability, namely, more flat residual surface plane and sharper hole edge. These results suggest that these glassy alloy thin films, especially Pd-based glassy alloy thin film have high potential for application to the nano-imprinting materials.