Back to Search Start Over

Editorial - Special issue on micro- and nano-patterning

Authors :
Heinz D. Wanzenboeck
Hermann Detz
Source :
Microelectronic Engineering. 177:A1
Publication Year :
2017
Publisher :
Elsevier BV, 2017.

Subjects

Subjects :
Nano
Nanotechnology
Electrical and Electronic Engineering
Condensed Matter Physics
Atomic and Molecular Physics, and Optics
Surfaces, Coatings and Films
Electronic, Optical and Magnetic Materials

Details

ISSN :
01679317
Volume :
177
Database :
OpenAIRE
Journal :
Microelectronic Engineering
Accession number :
edsair.doi...........06a2c639fabf34b9f4627137f2567205

Tools

Authors Abstract Subjects Details