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Improvement of an Active Temperature Measurement Cantilever of a Scanning Thermal Microscope

Authors :
Takahiro Kanda
Osamu Nakabeppu
Source :
IEEJ Transactions on Sensors and Micromachines. 124:453-458
Publication Year :
2004
Publisher :
Institute of Electrical Engineers of Japan (IEE Japan), 2004.

Subjects

Subjects :
Microscope
Cantilever
Materials science
business.industry
Atomic force microscopy
Mechanical Engineering
Analytical chemistry
Micro fabrication
Temperature measurement
law.invention
law
Thermal
Optoelectronics
Electrical and Electronic Engineering
business

Details

ISSN :
13475525 and 13418939
Volume :
124
Database :
OpenAIRE
Journal :
IEEJ Transactions on Sensors and Micromachines
Accession number :
edsair.doi...........065c0901069c5ace456ec6beef6414e1

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