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Electron emission properties of planar-type electron emission sources based on nanocrystalline silicon
- Source :
- 2020 33rd International Vacuum Nanoelectronics Conference (IVNC).
- Publication Year :
- 2020
- Publisher :
- IEEE, 2020.
-
Abstract
- Electron emission properties of planar-type electron emission sources based on oxidized nanocrystalline silicon with graphene-gate electrode were investigated. The emission current was improved by an order of magnitude by vacuum annealing.
- Subjects :
- Materials science
Silicon
Physics::Instrumentation and Detectors
Annealing (metallurgy)
business.industry
Graphene
Astrophysics::High Energy Astrophysical Phenomena
Nanocrystalline silicon
chemistry.chemical_element
Astrophysics::Cosmology and Extragalactic Astrophysics
Electron
law.invention
Condensed Matter::Materials Science
Planar
chemistry
law
Electrode
Optoelectronics
business
Astrophysics::Galaxy Astrophysics
Order of magnitude
Subjects
Details
- Database :
- OpenAIRE
- Journal :
- 2020 33rd International Vacuum Nanoelectronics Conference (IVNC)
- Accession number :
- edsair.doi...........06337c38c29ade1efc64ccd91bca990e