Semi-contact measurements of three-dimensional surfaces utilizing a resonant uniaxial microprobe

Recent development trends in the area of tactile probing systems led to miniaturized highly accurate probes that allow measurements of small structures with a high aspect ratio. Additionally, small contact forces are aspired to achieve measurements without damage to the specimen. Thus, more and more challenges arise because of an increasing influence of scaling effects. Sticking is one crucial effect that generates measurement faults such as snap-back and false triggering. This work presents investigations on a highly accurate electrostatic probing system, which operates at resonant motion to minimize the influence of capillary forces. The unique feature of the uniaxial microprobe is the fully integrated design in a silicon-on-insulator substrate, which minimizes the number of coupling connections and improves the measurement accuracy.