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Electrical Properties of MFIS-and MFMIS-FETs Using Ferroelectric SrBi2Ta2O9 Film and SrTa2O6/SiON Buffer Layer
- Source :
- Extended Abstracts of the 1999 International Conference on Solid State Devices and Materials.
- Publication Year :
- 1999
- Publisher :
- The Japan Society of Applied Physics, 1999.
Details
- Database :
- OpenAIRE
- Journal :
- Extended Abstracts of the 1999 International Conference on Solid State Devices and Materials
- Accession number :
- edsair.doi...........052b9dbb64f578ae98de3c6f43f1da9c