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Electrical Properties of MFIS-and MFMIS-FETs Using Ferroelectric SrBi2Ta2O9 Film and SrTa2O6/SiON Buffer Layer

Authors :
Hiroshi Ishiwara
Eisuke Tokumitsu
Gen Fujii
Source :
Extended Abstracts of the 1999 International Conference on Solid State Devices and Materials.
Publication Year :
1999
Publisher :
The Japan Society of Applied Physics, 1999.

Details

Database :
OpenAIRE
Journal :
Extended Abstracts of the 1999 International Conference on Solid State Devices and Materials
Accession number :
edsair.doi...........052b9dbb64f578ae98de3c6f43f1da9c