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Electron Trapping in Ultrathin SiO/sub 2/ on Si[001] Probed by Electric-Field-Induced Second-Harmonic
- Source :
- Nonlinear Optics '98. Materials, Fundamentals and Applications Topical Meeting (Cat. No.98CH36244).
- Publication Year :
- 2002
- Publisher :
- IEEE, 2002.
-
Abstract
- Electric-field-induced second-harmonic generation (EFISHG) allows the direct observation of charge trapping at near-interface oxide defects, which alters the reflected second-harmonic (SH) signal due to a change of the band-bending in the silicon space-charge region (SCR) at the interface.
Details
- Database :
- OpenAIRE
- Journal :
- Nonlinear Optics '98. Materials, Fundamentals and Applications Topical Meeting (Cat. No.98CH36244)
- Accession number :
- edsair.doi...........04ccf2ad09f079025a8a11bdab03acfa
- Full Text :
- https://doi.org/10.1109/nlo.1998.710192