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Quantitative Analysis: The SEM/EDS Elemental Microanalysis k-ratio Procedure for Bulk Specimens, Step-by-Step

Authors :
John Henry J. Scott
Joseph R. Michael
Joseph I. Goldstein
Dale E. Newbury
Nicholas W. M. Ritchie
David C. Joy
Source :
Scanning Electron Microscopy and X-Ray Microanalysis ISBN: 9781493966745
Publication Year :
2017
Publisher :
Springer New York, 2017.

Abstract

This module discusses the procedure used to perform a rigorous quantitative elemental microanalysis by SEM/EDS following the k-ratio/matrix correction protocol using the NIST DTSA-II software engine for bulk specimens. Bulk specimens have dimensions that are sufficiently large to contain the full range of the direct electron-excited X-ray production (typically 0.5–10 μm) as well as the range of secondary X-ray fluorescence induced by the propagation of the characteristic and continuum X-rays (typically 10–100 μm).

Details

ISBN :
978-1-4939-6674-5
ISBNs :
9781493966745
Database :
OpenAIRE
Journal :
Scanning Electron Microscopy and X-Ray Microanalysis ISBN: 9781493966745
Accession number :
edsair.doi...........04b4e1fd8ec0d68bea83e9eecfcfbbbf
Full Text :
https://doi.org/10.1007/978-1-4939-6676-9_20