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Electroless Cobalt Via Pre-Fill Process for Advanced BEOL Metallization and Via Resistance Variation Reduction

Authors :
Kiroubanand Sankaran
Zsolt Tokei
Geoffrey Pourtois
Kristof Moors
Christoph Adelmann
Shibesh Dutta
Source :
2018 IEEE International Interconnect Technology Conference (IITC).
Publication Year :
2018
Publisher :
IEEE, 2018.

Subjects

Subjects :
010302 applied physics
Reduction (complexity)
Materials science
chemistry
0103 physical sciences
Metallurgy
chemistry.chemical_element
02 engineering and technology
021001 nanoscience & nanotechnology
0210 nano-technology
01 natural sciences
Cobalt

Details

Database :
OpenAIRE
Journal :
2018 IEEE International Interconnect Technology Conference (IITC)
Accession number :
edsair.doi...........044a3ff805bef91e93ce524869a16219
Full Text :
https://doi.org/10.1109/iitc.2018.8457071
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