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Development of a 36-element piezoelectric deformable mirror for synchrotron radiation and its surface control ability
- Source :
- Chinese Optics. 14:1362-1367
- Publication Year :
- 2021
- Publisher :
- Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, 2021.
Details
- ISSN :
- 20951531
- Volume :
- 14
- Database :
- OpenAIRE
- Journal :
- Chinese Optics
- Accession number :
- edsair.doi...........041e77293de913619e24936ee8e2cbc4