Versatile Wire Configuration for Independent Actuation of Bending and Torsion Displacements of Microcantilevers

The deposition of three wires on the surface of a microcantilever enables both electrothermal and electromagnetic actuation of bending and torsional displacements. Four bending and four torsion modes of a 2700mum times 500mum times 30mum beam were excited electro-magnetically, and two bending and one torsion resonance were excited electrothermally