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Vapor Introduction Method for Direct Determination of Phosphorus in Trichlorosilane by Inductively Coupled Plasma Atomic Emission Spectrometry

Authors :
Akiko Sakashita
Takamasa Takahashi
Hideo Iwata
Tadashi Mochizuki
Source :
Analytical Sciences. 6:303-305
Publication Year :
1990
Publisher :
Springer Science and Business Media LLC, 1990.

Subjects

Subjects :
chemistry.chemical_compound
chemistry
Trichlorosilane
Inductively coupled plasma atomic emission spectroscopy
Phosphorus
Analytical chemistry
chemistry.chemical_element
Microwave digestion
Inductively coupled plasma
Inductively coupled plasma mass spectrometry
Analytical Chemistry
Atomic emission spectrometry
Volumetric flow rate

Details

ISSN :
13482246 and 09106340
Volume :
6
Database :
OpenAIRE
Journal :
Analytical Sciences
Accession number :
edsair.doi...........02d84445b566e4195fd05b69c508fbfa
Full Text :
https://doi.org/10.2116/analsci.6.303
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