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Electromigration Reliability of Barrierless Ruthenium and Molybdenum for Sub-10 nm Interconnection
- Source :
- ACS Applied Electronic Materials. 5:2447-2453
- Publication Year :
- 2023
- Publisher :
- American Chemical Society (ACS), 2023.
- Subjects :
- Materials Chemistry
Electrochemistry
Electronic, Optical and Magnetic Materials
Subjects
Details
- ISSN :
- 26376113
- Volume :
- 5
- Database :
- OpenAIRE
- Journal :
- ACS Applied Electronic Materials
- Accession number :
- edsair.doi...........026df6c01fb2a7e852047ef83672819d
- Full Text :
- https://doi.org/10.1021/acsaelm.3c00070