ALD HfO2 Films for Defining Microelectrodes for Electrochemical Sensing and Other Applications

Authors :: Charmaine Chia
Roger T. Howe
Max M. Shulaker
Stefanie S. Jeffrey
J. Provine
Source :: ACS Applied Materials & Interfaces. 11:26082-26092
Publication Year :: 2019
Publisher :: American Chemical Society (ACS), 2019.
Abstract: Microelectrodes are used in a wide range of applications from analytical electrochemistry and biomolecular sensing to in vivo implants. While a variety of insulating materials have been used to define the microelectrode active area, most are not suitable for nanoscale electrodes (

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