Laser Acoustic Imaging of Film Bulk Acoustic Resonator (FBAR) Lateral Mode Dispersion

A laser acoustic imaging microscope has been developed that measures acoustic motion with high spatial resolution without scanning. Images are recorded at normal video frame rates and heterodyne principles are used to allow operation at any frequency from Hz to GHz. Fourier transformation of the acoustic amplitude and phase displacement images provides a direct quantitative determination of excited mode wavenumbers at any frequency. Results are presented at frequencies near the first longitudinal thickness mode (∼ 900 MHz) demonstrating simultaneous excitation of lateral modes with nonzero wavenumbers in an electrically driven AlN thin film acoustic resonator. Images combined at several frequencies form a direct visualization of lateral mode dispersion relations for the device under test allowing mode identification and a direct measure of specific lateral mode properties. Discussion and analysis of the results are presented in comparison with plate wave modeling of these devices taking account for material anisotropy and multilayer films.