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Gaussian Focused-Cavity Resonator
- Source :
- 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS).
- Publication Year :
- 2021
- Publisher :
- IEEE, 2021.
-
Abstract
- Contour mode resonators in suspended AlN films experience performance limitations from anchors and bussing. To mitigate this, we show how confocal acoustical resonators designed with tailored electrode shapes increase quality factor by concentrating the mode energy toward the resonator center, focusing the cavity mode away from anchors, while also maintaining coupling coefficient even with extremely tight focusing. We present a theoretical treatment for electrode design and present an experimental analysis comparing straight fingered vs focused cavity, showing both a Q increase and constant coupling coefficient while the radius of curvature is increased from loose focusing to the diffraction limit.
- Subjects :
- 010302 applied physics
Diffraction
Materials science
business.industry
Gaussian
02 engineering and technology
021001 nanoscience & nanotechnology
01 natural sciences
Radius of curvature (optics)
Resonator
symbols.namesake
Quality (physics)
Optics
Transducer
0103 physical sciences
Electrode
symbols
0210 nano-technology
business
Coupling coefficient of resonators
Subjects
Details
- Database :
- OpenAIRE
- Journal :
- 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)
- Accession number :
- edsair.doi...........0054e0b04bf5a9861c9b71c2ce7d940a