Growth of Oxide BTO/STO Artificial Superlattice by Pulsed Laser Deposition

Artificial superlattice of the ferroelectric BaTiO 3 /SrTiO 3 multilayer thin film has been fabricated by pulsed laser deposition. In this hetero epitaxial BTO/STO layers, each layers have been continuously grown on (La 0.5 ,Sr 0.5 )TiO 3 /MgO(100) with a periodicity ranging from (BTO 1 unit cell /STO 1 unit cell ) 125 to (BTO 125 unit cell /STO 125 unit cell ) 1 . The total thickness of BaTiO 3 /SrTiO 3 superlattice was 100 nm. X-ray diffraction results clearly showed that epitaxial BTO/STO superlattice was formed with a various periodicity. The depth profile in the superlattice showed that there was no serious interdiffusion between BaTiO 3 and SrTiO 3 layer by Auger electron spectroscope(AES).