Multilayer development for the generation beyond EUVL: 6.x nm

MLA

Igor Alexandrovich Makhotkin, et al. Multilayer Development for the Generation beyond EUVL: 6.x Nm. June 2013. EBSCOhost, widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsair&AN=edsair.dedup.wf.001..f1e1a2e148038d1f91e97da545918db5&authtype=sso&custid=ns315887.

APA

Igor Alexandrovich Makhotkin, Zoethout, E., Nyabero, S. L., Viacheslav Medvedev, Robbert van de Kruijs, Andrey Yakshin, Eric Louis, Yakunin, A. M., Banine, V., Muellender, S., & Frederik Bijkerk. (2013). Multilayer development for the generation beyond EUVL: 6.x nm.

Chicago

Igor Alexandrovich Makhotkin, E. Zoethout, S. L. Nyabero, Viacheslav Medvedev, Robbert van de Kruijs, Andrey Yakshin, Eric Louis, et al. 2013. “Multilayer Development for the Generation beyond EUVL: 6.x Nm,” June. http://widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsair&AN=edsair.dedup.wf.001..f1e1a2e148038d1f91e97da545918db5&authtype=sso&custid=ns315887.