Wafer-scale van der Waals Epitaxy of III-Nitride Devices on h-BN-An Overview of 2D/3D Epitaxy, Device Fabrication, Mechanical Release-Transfer Methods and Device Performances

Authors :: Ougazzaden, Abdallah
Sundaram, Suresh
Vuong, Thi quynh phuong
Karrakchou, Soufiane
Mballo, Adama
Gujrati, Rajat
Srivastava, Ashutosh
Patriarche, Gilles
Voss, Paul
Salvestrini, Jean-Paul
Georgia Tech Lorraine [Metz]
Université de Franche-Comté (UFC)
Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Ecole Supérieure d'Electricité - SUPELEC (FRANCE)-Georgia Institute of Technology [Atlanta]-CentraleSupélec-Ecole Nationale Supérieure des Arts et Metiers Metz-Centre National de la Recherche Scientifique (CNRS)
DASTILLUNG, NADEGE
Source :: MRS 2021, MRS 2021, Dec 2021, Boston, United States
Publication Year :: 2021
Publisher :: HAL CCSD, 2021.
Abstract: Conférence invitée; International audience

Subjects :: [SPI]Engineering Sciences [physics]
[SPI] Engineering Sciences [physics]

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