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Depth analysis of Fe-silicide formation after Fe-implantation into Si by DCEMS

Authors :
Kruijer, S.
Dobler, M.
Reuther, H.
Keune, W.
Source :
Int. Conf. Appl. Mössbauer Effect, Rio de Janeiro, Sept. 14-20, 1997, Hyperfine Interactions (C) 3 (1998) 149
Publication Year :
1997

Details

Language :
English
Database :
OpenAIRE
Journal :
Int. Conf. Appl. Mössbauer Effect, Rio de Janeiro, Sept. 14-20, 1997, Hyperfine Interactions (C) 3 (1998) 149
Accession number :
edsair.dedup.wf.001..b011947ad2c803bc87fe2ac77861cdc0

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