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Three-dimensional writing inside silicon using a 2-µm picosecond fiber laser
- Source :
- Proceedings of ICALEO 2019, Proceedings of ICALEO 2019, 2019, Paper#142, HAL
- Publication Year :
- 2019
- Publisher :
- HAL CCSD, 2019.
-
Abstract
- International audience; Based on the development of a µJ-class Thulium-doped fiber laser operating in the picosecond regime at 1970-nm wavelength, we introduce a solution for three-dimensional (3D) laser writing technologies inside silicon (Si). We reveal that the nonlinear effects preventing from bulk modification in Si with femtosecond pulses persist in the picosecond regime. However, these are strongly reduced which makes possible to derive conditions for a demonstration of data inscription and reading deep into a Si wafer.
Details
- Language :
- English
- Database :
- OpenAIRE
- Journal :
- Proceedings of ICALEO 2019, Proceedings of ICALEO 2019, 2019, Paper#142, HAL
- Accession number :
- edsair.dedup.wf.001..9e0b313a10f41beb3f51035ef3414306