Multi-agent MagLev

A nano-precision-capable, multi-agent, flexible positioning platform can be used to increase (metrology) throughput in semiconductor industry by parallelisation of measurements. It is based on magnetic levitation (MagLev) and 6-DoF control, combining large x- and y-motions with sub-nanometer scanning resolution in a single stage. The system architecture of this flexible positioning platform has the ability to operate many devices in parallel. Each device can function as a lab-on-instrument to perform various tasks at the nanoscale, e.g. metrology, inspection, deposition, transport, cleaning, etc. A demonstrator set-up was successfully designed, built and tested.