Proceedings of the Dielectrics for Nanosystems 8: Materials Science, Processing, Reliablity and Manufacturing

Authors :: Misra, D
Chen, Z.
Ko, D.-K.
Obeng, Y.
Bauza, D.
Chikyow, T.
New Jersey Institute of Technology [Newark] (NJIT)
University of Kentucky
National Institute of Standards and Technology [Gaithersburg] (NIST)
Institut de Microélectronique, Electromagnétisme et Photonique - Laboratoire d'Hyperfréquences et Caractérisation (IMEP-LAHC)
Université Savoie Mont Blanc (USMB [Université de Savoie] [Université de Chambéry])-Centre National de la Recherche Scientifique (CNRS)-Université Grenoble Alpes (UGA)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )
Université Grenoble Alpes (UGA)
Center for Materials Research by Information Integration
National Institute for Materials Science (NIMS)
Source :: ECS Transactions, 237th ECS Meeting, 237th ECS Meeting, ECS Transactions, 97 (1), The Electrochemical Society, 2020, ECS Transactions, 978-1-60768-889-1
Publication Year :: 2020
Publisher :: HAL CCSD, 2020.
Abstract: International audience

Subjects :: [SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics
ComputingMilieux_MISCELLANEOUS

Language :: English
ISBN :: 978-1-60768-889-1
ISSN :: 19385862 and 19386737
ISBNs :: 9781607688891
Database :: OpenAIRE
Journal :: ECS Transactions, 237th ECS Meeting, 237th ECS Meeting, ECS Transactions, 97 (1), The Electrochemical Society, 2020, ECS Transactions, 978-1-60768-889-1
Accession number :: edsair.dedup.wf.001..7922429169589642c198fd79a767412f

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