Nano-precision multi-agent Maglev positioning platform

This project is aiming to realize miniature self-contained carriers that can independently perform positioning and scanning tasks on nano-scale. Such carriers can support agents for performing tasks such as inspection, deposition, repair, and cleaning. All at the nano-scale. The carriers can make large movements in X-and Y-direction and have a smaller range in Z, and rotations. This is sufficient to cover relevant surfaces in, for instance, semicon industry, such as wafers and reticles.