Cite
Modeling and characterization of piezoelectric beams based on an aluminum nitride thin-film layer
MLA
Herth, Etienne, et al. Modeling and Characterization of Piezoelectric Beams Based on an Aluminum Nitride Thin-Film Layer. Jan. 2016. EBSCOhost, https://doi.org/10.1002/pssa.201532302⟩.
APA
Herth, E., Algré, E., Rauch, J.-Y., Gerbedoen, J.-C., Defrance, N., & Delobelle, P. (2016). Modeling and characterization of piezoelectric beams based on an aluminum nitride thin-film layer. https://doi.org/10.1002/pssa.201532302⟩
Chicago
Herth, Etienne, E. Algré, Jean-Yves Rauch, Jean-Claude Gerbedoen, N. Defrance, and Patrick Delobelle. 2016. “Modeling and Characterization of Piezoelectric Beams Based on an Aluminum Nitride Thin-Film Layer,” January. doi:10.1002/pssa.201532302⟩.