A Clover shaped silicon piezoresistive microphone for miniaturized photoacoustic gas sensors

Here we present the design and modeling of a novel piezoresistive microphone designed for a photoacoustic gas sensor system. The microphone is fabricated using a novel process to enable DRIE etch through of membranes of multiple thickness. A Clover shaped silicon piezoresistive microphone for miniaturized photoacoustic gas sensors