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AFM and ellipsometry combined for nanoscale imaging
- Source :
- DPI Annual Meeting 2010, MESA+ Meeting 2010
- Publication Year :
- 2010
- Subjects :
- METIS-272616
Subjects
Details
- Language :
- English
- Database :
- OpenAIRE
- Journal :
- DPI Annual Meeting 2010, MESA+ Meeting 2010
- Accession number :
- edsair.dedup.wf.001..365499e8b31e892c1e70df4a8d890abc