Tracking polarization loss and imprint during electrical tests in sputtered TiN/HZO/TiN capacitors

Authors :: Bertrand Vilquin
Jordan Bouaziz
Nicolas Baboux
Pedro Rojo Romeo
INL - Matériaux Fonctionnels et Nanostructures (INL - MFN)
Institut des Nanotechnologies de Lyon (INL)
École Centrale de Lyon (ECL)
Université de Lyon-Université de Lyon-Université Claude Bernard Lyon 1 (UCBL)
Université de Lyon-École Supérieure de Chimie Physique Électronique de Lyon (CPE)-Institut National des Sciences Appliquées de Lyon (INSA Lyon)
Université de Lyon-Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Centre National de la Recherche Scientifique (CNRS)-École Centrale de Lyon (ECL)
Université de Lyon-Institut National des Sciences Appliquées (INSA)-Institut National des Sciences Appliquées (INSA)-Centre National de la Recherche Scientifique (CNRS)
NamLab
European Project: 780302,EC | H2020 | RIA,3eFERRO(2018)
INL - Hétéroepitaxie et Nanostructures (INL - H&N)
Université de Lyon-École supérieure de Chimie Physique Electronique de Lyon (CPE)-Institut National des Sciences Appliquées de Lyon (INSA Lyon)
Vilquin, Bertrand
Energy Efficient Embedded Non-volatile Memory Logic based on Ferroelectric Hf(Zr)O2 - 3eFERRO - - EC | H2020 | RIA2018-01-01 - 2021-06-30 - 780302 - VALID
Source :: Novel high-k workshop applications, Novel high-k workshop applications, NamLab, Apr 2021, Dresden, Germany, HAL
Publication Year :: 2021
Publisher :: HAL CCSD, 2021.
Abstract: International audience

Subjects :: [CHIM.MATE] Chemical Sciences/Material chemistry
[SPI.NANO] Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics
[PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci]
[CHIM.MATE]Chemical Sciences/Material chemistry
[SPI.MAT] Engineering Sciences [physics]/Materials
[SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics
[PHYS.COND.CM-MS] Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci]
ComputingMilieux_MISCELLANEOUS
[SPI.MAT]Engineering Sciences [physics]/Materials

Language :: English
Database :: OpenAIRE
Journal :: Novel high-k workshop applications, Novel high-k workshop applications, NamLab, Apr 2021, Dresden, Germany, HAL
Accession number :: edsair.dedup.wf.001..30f85f88c401de5d64a463c7b1d65970

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