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Flexible AMOLED display on polyethylene napthalate (PEN) foil with metal-oxide TFT backplane

Authors :
Tripathi, A. K.
Putten, B.
Steen, J. -L
Tempelaars, K.
Cobb, B.
Ameys, M.
Ke, T. H.
Myny, K.
Steudel, S.
Nag, M.
Schols, S.
Vicca, P.
Smout, S.
Jan Genoe
Heremans, P.
Yakimets, I.
Gelinck, G.
Molecular Materials and Nanosystems
Source :
Society for Information Display-19th International Display Workshops 2012, IDW/AD 2012, 3, 1782-1785, Scopus-Elsevier, 19th International Display Workshops in Conjunction with Asia Display 2012, IDW/AD 2012, 4 December 2012 through 7 December 2012, Kyoto, 3, 1782-1785
Publication Year :
2012

Abstract

We present a top emitting monochrome AMOLED display with 85dpi resolution using an amorphous Indium-Gallium-Zinc-Oxide (IGZO) TFT backplane on PEN-foil. Maximum processing temperature was limited to 150 °C in order to ensure an overlay accuracy < 3μm on PEN foil. The backplane process flow is based on a 7 mask photolithography process that yields a final mobility of the IGZO TFTs of ∼ 13 cm2A/s.

Details

Language :
English
Database :
OpenAIRE
Journal :
Society for Information Display-19th International Display Workshops 2012, IDW/AD 2012, 3, 1782-1785, Scopus-Elsevier, 19th International Display Workshops in Conjunction with Asia Display 2012, IDW/AD 2012, 4 December 2012 through 7 December 2012, Kyoto, 3, 1782-1785
Accession number :
edsair.dedup.wf.001..3028911c475d1cf33a92479f0d6740f5