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Flexible AMOLED display on polyethylene napthalate (PEN) foil with metal-oxide TFT backplane
- Source :
- Society for Information Display-19th International Display Workshops 2012, IDW/AD 2012, 3, 1782-1785, Scopus-Elsevier, 19th International Display Workshops in Conjunction with Asia Display 2012, IDW/AD 2012, 4 December 2012 through 7 December 2012, Kyoto, 3, 1782-1785
- Publication Year :
- 2012
-
Abstract
- We present a top emitting monochrome AMOLED display with 85dpi resolution using an amorphous Indium-Gallium-Zinc-Oxide (IGZO) TFT backplane on PEN-foil. Maximum processing temperature was limited to 150 °C in order to ensure an overlay accuracy < 3μm on PEN foil. The backplane process flow is based on a 7 mask photolithography process that yields a final mobility of the IGZO TFTs of ∼ 13 cm2A/s.
- Subjects :
- Photolithography
Processing temperature
Photolithography process
HOL - Holst
High Tech Systems & Materials
Displays
SDG 3 - Good Health and Well-being
AMOLED
Electronics Industry
Indium gallium zinc oxides (IGZO)
Low temperatures
AM-OLED
Metal-oxide semiconductors
TS - Technical Sciences
Industrial Innovation
Metal oxide semiconductor
Temperature
Thin film transistors
Mechatronics, Mechanics & Materials
Light emitting diodes
Flexible displays
Polyethylene napthalate
Display devices
Flexible
Low-temperature
Subjects
Details
- Language :
- English
- Database :
- OpenAIRE
- Journal :
- Society for Information Display-19th International Display Workshops 2012, IDW/AD 2012, 3, 1782-1785, Scopus-Elsevier, 19th International Display Workshops in Conjunction with Asia Display 2012, IDW/AD 2012, 4 December 2012 through 7 December 2012, Kyoto, 3, 1782-1785
- Accession number :
- edsair.dedup.wf.001..3028911c475d1cf33a92479f0d6740f5