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Combined electron beam lithography and UV lithography in SU-8

Authors :
Morten Gersborg-Hansen
Lasse Højlund Eklund Thamdrup
Mironov, A.
Anders Kristensen
Source :
Technical University of Denmark Orbit

Details

Database :
OpenAIRE
Journal :
Technical University of Denmark Orbit
Accession number :
edsair.dedup.wf.001..2e3f5a87fe5a0f6c4bd36dae2bc6d609

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