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Integration of functional oxides on silicon for nanoelectronics and energy
- Source :
- International Conference on Materials and Characterization Techniques (ICMCT), International Conference on Materials and Characterization Techniques (ICMCT), 2014, VIT Univ., Vellore, Chennai, India
- Publication Year :
- 2014
- Publisher :
- HAL CCSD, 2014.
-
Abstract
- March 10 – 12, 2014; International audience; no abstract
- Subjects :
- [SPI]Engineering Sciences [physics]
[SPI.OPTI] Engineering Sciences [physics]/Optics / Photonic
[SPI] Engineering Sciences [physics]
[SPI.NANO] Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics
[SPI.OPTI]Engineering Sciences [physics]/Optics / Photonic
[SPI.MAT] Engineering Sciences [physics]/Materials
[SPI.NANO]Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics
[SPI.MAT]Engineering Sciences [physics]/Materials
Subjects
Details
- Language :
- English
- Database :
- OpenAIRE
- Journal :
- International Conference on Materials and Characterization Techniques (ICMCT), International Conference on Materials and Characterization Techniques (ICMCT), 2014, VIT Univ., Vellore, Chennai, India
- Accession number :
- edsair.dedup.wf.001..1d9289d8d2bbe0258d695481083e11ff