Mesure de champs de déplacement micrométrique d'une surface par corrélation de sa topographie

National audience; We present an experimental set-up that allows us to measure in-plane and out-ofplane displacement fields of surfaces in reflection microscopy. This set-up is based upon a Nomarski shear-interferometer, which is used with two different Wollaston prisms. The real topography of the object is deduced and divided into mean surface and roughness. The out-of-plane displacement field is obtained by difference of mean surfaces, while the in-plane displacement field is deduced from the cross-correlation of the roughness.